[[Ionization gauge]] Which one of these is the one that ion getter pumps act like? http://www.aiv.it/ITA/pubblicazioni/articolo.php?articolo=art4 says "similar to a cold cathode gauge" + Sputter-Ion pumps (use [[sputtering]] to renew the titanium) + NEG (Non-evaporative Getter) ==== Unused sources ======== http://www.cae2k.com/howto.html#bake - it's not clear who the publisher is ==== Notes ==== The article now notes that the typical operating range is 10^-3 to 10^-12 torr... http://www.aiv.it/ITA/pubblicazioni/articolo.php?articolo=art4 Ideally, ion pumps should be started at pressures near 1x10^-5 torr, although in practice starting pressures near 10^-3 torr are more common. The ultimate pressure of an isolated pump is the 10^-12 torr range. There is not single, simple, specific reason for the particular ultimate pressure